P.G. May, R. Petkie, et al.
Applied Physics Letters
Silicon Mach-Zehnder waveguide modulators have been fabricated and operation characterized at the wavelength of 1.3 μm. Device operation is based on the free-carrier-induced change in the refractive index of silicon. Modulation depths of -4.9 dB and response times τresponse<50 ns have been achieved at λ=1.3 μm for an injected carrier density of 6.5×1017 cm-3.
P.G. May, R. Petkie, et al.
Applied Physics Letters
Santanu Basu, Paul May, et al.
ASSL 1989
J.-M. Halbout, P.G. May, et al.
Advances in Semiconductors and Semiconductor Structures 1987
Paul G. May, Jean-Marc Halbout, et al.
IEEE JQE