Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper considers a multiclass routing and server allocation problem in a queueing system of multiple stations in parallel with penalties for switching the server between stations. We proceed by dynamically ranking the queues so that if all arrivals ceased, switches of the server between queues would be maximally delayed by serving queues in order of rank. The main result of this paper shows that we may improve any policy by constructing a greedy version that routes arriving customers to the queue of highest acceptable rank and allocates the server to the queue of highest rank whenever it switches. We also establish analogous results for a variant of the problem that encourages fairness in server allocation by restricting attention to pseudocyclic policies which visit each queue periodically. © 1996 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
Lixi Zhou, Jiaqing Chen, et al.
VLDB
Raymond Wu, Jie Lu
ITA Conference 2007