Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A greedy algorithm for a class of convex optimization problems is presented in this paper. The algorithm is motivated from function approximation using sparse combination of basis functions as well as some of its variants. We derive a bound on the rate of approximate minimization for this algorithm, and present examples of its application. Our analysis generalizes a number of earlier studies.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Khalid Abdulla, Andrew Wirth, et al.
ICIAfS 2014
Victor Valls, Panagiotis Promponas, et al.
IEEE Communications Magazine
Michael D. Moffitt
ICCAD 2009