L. Miotti, R.P. Pezzi, et al.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Paper
Selective desorption of interfacial SiO2
Abstract
The selective thermal decomposition of silica from a silicate/silicon (001) interface without silicidation of the dielectric was reported. The electrical characteristics of silicate/silicon interfaces were studied. The intriguing consequence of the relative stability of metal-oxide compounds was discussed. It was shown that after initial silicate formation excess of interfacial silica is decomposed.