Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper discusses scheduling algorithms for a certain kind of manufacturing environment, called the 'flexible flow line'. Two scheduling problems are considered. 'Loading' decides when each part should be loaded into the system. 'Mix allocation' selects the daily part mix. The goals are to maximize throughput and reduce WIP. New heuristic algorithms specially suited to solve these problems in the context of a flexible flow line are described. The paper also discusses experience with the use of an experimental implementation of these algorithms to solve such problems arising in a real production line.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
Heinz Koeppl, Marc Hafner, et al.
BMC Bioinformatics