C.C. Williams, H.K. Wickramasinghe
Applied Physics Letters
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10 -19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
C.C. Williams, H.K. Wickramasinghe
Applied Physics Letters
J.F. Smyth, S. Schultz, et al.
Journal of Applied Physics
T.H.P. Chang, M.G.R. Thomson, et al.
SPIE Optical Science, Engineering, and Instrumentation 1995
S. Rishton, K. Ismail, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures