Conference paper
Thermal and photo thermal imaging on a sub 100 nanometer scale
C.C. Williams, H.K. Wickramasinghe
SPIE OE/LASE 1988
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10 -19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
C.C. Williams, H.K. Wickramasinghe
SPIE OE/LASE 1988
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Microelectronic Engineering
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