Conference paper
Characterization of a next generation step-and-scan system
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The principle of the elastic equivalence of statically equivalent systems of load, or Saint-Venant's Principle, is given a precise mathematical formulation and proof. Counterexamples to traditional verbal statements of the principle are given, and the results are compared with previous mathematical work on the Saint-Venant principle. © 1965 Springer-Verlag.
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SPIE Advanced Lithography 1998
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