Conference paper
Direct phase measurements in phase-shift masks
A.P. Ghosh, D.B. Dove
Microlithography 1992
Results are presented on the observation of 5 μm×5 μm defects in a similar size periodic structure using self-pumping in a 5 mm×6 mm×5 mm barium titanate crystal and optics of NA ≈ 0.1 Signal-to-noise ratios in excess of 10:1 have been obtained, indicating that smaller sizes can be detected using a larger crystal and optics with higher NA without the need to magnify the object mask. The self-pumping geometry is useful in simplifying the experimental setup. © 1990.
A.P. Ghosh, D.B. Dove
Microlithography 1992
A.P. Ghosh, D. Just, et al.
Optics Communications
A.P. Ghosh, D. Just, et al.
Optics Communications
R.R. Dube, D. Just, et al.
Proceedings of SPIE 1989