Robert W. Keyes
Physical Review B
Frequency modulation spectroscopy (FMS) is an optical heterodyne technique which allows high-resolution, high-sensitivity measurements of absorptions or dispersions associated with narrow spectral features. With new methods, the sensitivity limitations of FMS (caused by residual amplitude modulation) can be overcome, and quantum-limited performance can be readily achieved. © 1986.
Robert W. Keyes
Physical Review B
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MRS Proceedings 1983
T.N. Morgan
Semiconductor Science and Technology
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010