Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm

Abstract

The complex transmission function of an integrated circuit is reconstructed at 20 nm spatial resolution using coherent diffractive imaging. A quantitative map is made of the exit surface wave emerging from void defects within the circuit interconnect. Assuming a known index of refraction for the substrate allows the volume of these voids to be estimated from the phase retardation in this region. Sample scanning and tomography of extended objects using coherent diffractive imaging is demonstrated. © 2008 American Institute of Physics.