Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
John G. Long, Peter C. Searson, et al.
JES
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Revanth Kodoru, Atanu Saha, et al.
arXiv