William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Pre-silieon yield estimators for ASIC products have the potential for improved accuracy based on retrospective critical area and yield analysis of completed designs. A prototype closed-loop system, in which a database of observed yield and computed critical areas is continuously compiled and updated, is described in this paper. The database allows a yield model based on circuit content, which is available at the time of quote, but before the physical layout, to be optimized to more accurately reflect a technology's random defect sensitivities. Confining one's observations to the mature 130-nm technology minimizes the inclusion of systematic defects in the observed yield and allows for a more complete view of the random defect component of yield loss. © 2008 IEEE.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
T.N. Morgan
Semiconductor Science and Technology