Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Figure Presented 3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated. © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta