American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Paper
01 Aug 1996

Preparation of lithographic resist materials by anionic polymerization

Related

Paper

Smart self-adjustment of surface micelles of an amphiphilic block copolymer to nanoscopic pattern boundaries

Bokyung Yoon, June Huh, et al.

Advanced Materials

Paper

Investigation of the radical copolymerization and terpolymerization of maleic anhydride and norbornenes by an in situ 1H NMR analysis of kinetics and by the mercury method: Evidence for the lack of charge-transfer-complex propagation

Hiroshi Ito, Dolores Miller, et al.

J Polym Sci Part A

Conference paper

Positive/negative mid uv resists with high thermal stability

Hiroshi Ito, Grant Willson

Proceedings of SPIE 1989

Paper

Evolution and progress of deep uv resist materials

Hiroshi Ito

J. Photopolym. Sci. Tech.

View all publications
  1. Home
  2. ↳ Publications

Date

01 Aug 1996

Publication

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Authors

  • Hiroshi Ito
IBM-affiliated at time of publication

Share