John G. Long, Peter C. Searson, et al.
JES
The limits of accuracy in an automatic wavelength-scanning ellipsometer are defined on the basis of measured mechanical properties of the instrument and the geometrical and optical defects of the optical components. A computational procedure is described for obtaining accurate Δ and ψ values by using a matrix model of the instrument, and the areás in which the greatest improvements in accuracy can be achieved are identified. © 1976.
John G. Long, Peter C. Searson, et al.
JES
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MRS Fall Meeting 2020