Polymeric matrix effects on the efficiency of acid generation from triphenylsulfonium salts

Abstract

The authors present here the results of acid analyses carried out following irradiation of various polymeric films containing sulfonium salts. It was found that the efficiency of acid generation is highly dependent on the structures of both the sulfonium salt and the polymer matrix. These experiments were carried out for both electron beam and ultraviolet irradiation of the films. The results suggest that a critical factor affecting the acid generating efficiency is the compatibilty of the sulfonium salt and polymer matrix with respect to polarity. This hypothesis is further supported by esr data which shows the formation of polymer radicals is best for polymers containing polar functional groups.