Picosecond photoelectron scanning electron microscope for noncontact testing of integrated circuits

Abstract

A scanning electron microscope which uses an ultrashort pulsed laser/photocathode combination as an electron source produces electron pulses of order 1 ps in duration at a 100-MHz repetition rate and with a peak brightness of 3×108 A/cm2 steradian at 1.8 keV. By using this instrument in the voltage contrast mode, without contact with the samples, we have been able to measure electrical pulses propagating on coplanar transmission lines with, simultaneously, a temporal resolution of 5 ps, a voltage resolution of 3 mV/(Hz)1/2, and a spatial resolution of 0.1 μm. These measurements are achieved with extraction fields above the sample of about 1 kV/mm.