L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
No abstract available.
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics