Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of thin and ultrathin polycrystalline yttrium iron garnet (YIG) films was prepared on quartz substrates by the pulsed laser deposition technique to study the effects of dimensional changes on the magnetic properties. The lattice cells of the samples were found to be distorted due to thermal induced stresses and structurals defects. The ferromagnetic resonance (FMR) data showed that the films thinner than 200 Å were homogeneous as compared to thicker films which consist of two regions. The shape anisotropy energy was reduced in ultrathin films due to reduced magnetization.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Lawrence Suchow, Norman R. Stemple
JES
J.H. Stathis, R. Bolam, et al.
INFOS 2005