Performance of multilayer dispersion elements from 80 to 500 ev

We have measured the reflectivity of several multilayer dispersion elements between 80 and 500 eV. Two samples of ReW-C and one of Ni-C with 2d spacing of approximately 70 and 150 Å were tested at angles of incidence between 10° to 80°. Measurements were made by fixing the incident and reflected angles (Bragg) and scanning the photon energy. Theoretical analyses of these multilayers have also been made and the results are compared with the experimental measurements. © 1984 SPIE.