Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
A universal method for representing solutions of the initial value problem ut = −2πiDu is presented for a large class of pseudo‐differential operators. The representations take the form of a path integral‐like operator. Three numerical approaches for evaluating these operators are treated. Practical interest in such universal methods depends on massively parallel computing systems. Copyright © 1990 Wiley Periodicals, Inc.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
A. Skumanich
SPIE OE/LASE 1992
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering