Sung Ho Kim, Oun-Ho Park, et al.
Small
Sung Ho Kim, Oun-Ho Park, et al.
Small
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Krol, C.J. Sher, et al.
Surface Science
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics