Ordered patterns of microimprinted bilayer polymer films with controlled dewetting and layer inversion

Abstract

A simple and fast route to fabrication of ordered micropatterns over large areas on various substrates by dewetting and partial layer inversion of patterned polymeric films, was illustrated. This method could easily produce the circular shape pattern arrays with submicrometer dimensions without any complicated, high-cost lithographic treatments. The selective partial layer inversion of a poly(dimethylsiloxane) (PDMS) mode with submicrometer pattern size allowed to produce patterns of smaller size. The results show that the P4VP/PS bilayer prepared on an oxygen plasma treated polyimide film are successfully converted into an ordered micropattern by the dewetting and partial layer inversion.