P. Muralt, H.P. Meier, et al.
Superlattices and Microstructures
Subwave length-resolution optical image recording is demonstrated by moving an extremely narrow aperture along a test object equipped with fine-line structures. Details of 25-nm size can be recognized using 488-nm radiation. The result indicates a resolving power of at least λ/20 which is to be compared with the values of λ/2.3 obtainable in conventional optical microscopy.
P. Muralt, H.P. Meier, et al.
Superlattices and Microstructures
H. Heinzelmann, D. Pohl
Applied Physics A Solids and Surfaces
J.K. Gimzewski, A. Humbert, et al.
Surface Science
D. Pohl
Institute of Physics Electron Microscopy and Analysis Group Conference 1991