PaperEffects of Material and Processing Parameters on the Dielectric Strength of Thermally Grown Si02 FilmsN.J. Chou, J.M. EldridgeJES
PaperInteraction of Ti with fused silica and sapphire during metallizationY.S. Chaug, N.J. Chou, et al.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffect of O+ and Ne+ implantation on the surface characteristics of thermally oxidized SiN.J. Chou, B.L. CrowderJournal of Applied Physics
PaperSilylation of resist materials using di- and polyfunctional organosilicon compoundsE. Babich, J. Paraszczak, et al.Microelectronic Engineering
