Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
The solution of a set of linear equations involving a circulant matrix is easily accomplished with an algorithm based on fast Fourier transforms. The numerical stability of this algorithm is studied. It is shown that the algorithm is weakly stable; i.e., if the circulant matrix is well conditioned, then the computed solution is close to the exact solution. On the other hand, it is shown that the algorithm is not strongly stable - the computed solution is not necessarily the solution of a nearby circular deconvolution problem.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002