Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper examines the complexity of several geometric problems due to unbounded dimension. The problems considered are: (i) minimum cover of points by unit cubes, (ii) minimum cover of points by unit balls, and (iii) minimum number of lines to hit a set of balls. Each of these problems is proven not to have a polynomial approximation scheme unless P = NP. Specific lower bounds on the error ratios attainable in polynomial time are given, assuming P ≠ NP. In particular, it is shown that covering by two cubes is in P while covering by three cubes is NP-complete. © 1990, Academic Press Limited. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SPIE Photomask Technology + EUV Lithography 2009
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ICLR 2023
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SIAM/ASA JUQ