Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We present a model for computation over the reals or an arbitrary (ordered) ring R. In this general setting, we obtain universal machines, partial recursive functions, as well as NP-complete problems. While our theory reflects the classical over Z (e.g., the computable functions are the recursive functions) it also reflects the special mathematical character of the underlying ring R (e.g., complements of Julia sets provide natural examples of R. E. undecidable sets over the reals) and provides a natural setting for studying foundational issues concerning algorithms in numerical analysis. © 1989 American Mathematical Society.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University