Conference paper
Lactones in 193 nm resists: What do they do?
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
We study an approximation method of stationary characters of a two-dimensional Markov chain via the Stein method. For this purpose, innovative methods are developed to estimate the moments of the Markov chain, as well as the solution to the Poisson equation with a partial differential operator.
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Robert S. Nelson, Zoran L. Barbaric, et al.
Proceedings of SPIE 1989