Geoffrey Burr, Sidney Tsai, et al.
IEDM 2023
We report the design, fabrication, and characterization of cantilevers with integrated AlN actuators and conductive PtSi tips for multi-frequency atomic force microscopy. These cantilevers also possess a stepped-rectangular geometry. The excellent dynamic behavior of these cantilevers is investigated using both finite-element simulations and experimental methods. Several imaging experiments are presented to illustrate the efficacy and versatility of these cantilevers. © 2012 American Institute of Physics.
Geoffrey Burr, Sidney Tsai, et al.
IEDM 2023
Angeliki Pantazi, Simeon Furrer, et al.
ACC 2015
Rachel J. Cannara, Abu Sebastian, et al.
NANO 2009
Valeria Bragaglia, Tommaso Stecconi, et al.
Neuronics 2024