Nonlinear frequency conversion in the hybrid Si₃N₄ - LiNbO₃ integrated platform

Abstract

We demonstrate optical frequency comb generation in hybrid high-Q optical microresonators fabricated using direct wafer bonding of photonic Damascene silicon nitride wafer with thin-film lithium niobate-on-insulator (LNOI). The devices enable direct phase control via Pockels effect.