PublicationADMETA 2006Conference paperNon-poisoning dual damascene patterning scheme for low-k and ultra low-k BEOLADMETA 2006AbstractAbstract not available.Home↳ PublicationsDate01 Dec 2006PublicationADMETA 2006AuthorsW. CoteD. EdelsteinC. BunkeP.E. BiolsiW. WilleH. BaksR. ContiT. DaltonT. HoughtonW.-K. LiY.-H. LinS. MoskowitzD.D. RestainoT. Van KleeckS. VogtT. IversIBM-affiliated at time of publicationShare
