Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A method is proposed for removing the "muffin-tin" restriction from the Green's function or the Korringa-Kohn-Rostoker method of band calculation and, more generally, from multiple-scattering theory as formulated by Beeby and Edwards. The method is applied to a model for crystalline silicon involving a single parameter which is adjusted to reproduce the experimental indirect gap. The numerical results are in good agreement with a large number of experiments and in particular support the view that the Δ axis is important to the reflectivity peak at 3.4 eV. (The energy separation Γ15-Γ25′ is found to be 3.04 eV.) © 1970 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
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Synthetic Metals