The DX centre
T.N. Morgan
Semiconductor Science and Technology
The tremendous variety of nanotechnology experiments and tools to fabricate and characterize ever-smaller structures down to molecular or even atomic scales leads to stringent demands for appropriate, so-called "silent", premises that allow such susceptible experiments to be conducted. Reducing dimensions means smaller absolute optical and electrical signal levels, and consequently reduced signal-to-noise ratios. Hence, in addition to short-range disturbances inside the laboratory, remote long-range noise sources have to be considered for next-generation laboratories that aim at screening the disturbances and keeping the remaining values at utmost constancy. We present a novel laboratory concept that addresses simultaneously all the disturbances relevant for nanotechnology, namely, vibrations, electro-magnetic fields, temperature, humidity, and sound. Particular attention was paid to tackling the mutual derogation of the various measures to enable unprecedented performance of the novel research platform. © 2013 The Royal Society of Chemistry.
T.N. Morgan
Semiconductor Science and Technology
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997