C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
No abstract available.
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.C. Marinace
JES
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008