Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theory of the magnetoresistance of disordered carbons is presented and applied to experimental results on carbon fibers and glassy carbon. The important features of the model include (a) a two-dimensional band structure and density of states, (b) a shallow acceptor level due to defects, (c) collision-broadened Landau levels, and (d) an extra density of states in the m=0 Landau level to account for the effects of partial three-dimensional ordering of the graphitelike layers. The negative magnetoresistance results from field-induced changes in the density of states which lead to an increase in the carrier concentration with field. Four structure-dependent parameters are used to fit the resistivity as a function of temperature, field strength, and orientation of the sample in the field. Approaches to improving the model are discussed. © 1979 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Robert W. Keyes
Physical Review B