Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Recent theoretical and experimental results are assessed as they relate to the structure and properties of the dominant native paramagnetic point defect (D center) and the mechanisms of H diffusion. These results lead us to propose that the D center is neither a dangling or a floating bond, but an intermediate configuration which we label "frustrated bond". Experimental results by Jackson et al. set an upper bound for the diffusivity of D centers, but are not incompatible with D centers mediating H motion. Doping- and illumination-enhanced H diffusion can be accounted for in a unifying manner in terms of excess D centers that are mobile and mediate H motion via the kick-out mechanism, without any new assumptions. © 1992.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
T. Schneider, E. Stoll
Physical Review B
T.N. Morgan
Semiconductor Science and Technology