Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Recent theoretical (renormalization group) results on phase diagrams and multicritical points in systems undergoing structural phase transitions are reviewed. Particular attention is given to (a) the effects of anisotropic stress on cubic systems, e.g. perovskites undergoing antiferrodistortive phase transitions (bicritical, tricritical, Potts model, Lifshitz points, etc.), (b) phase diagrams of alloys, (c) the effects of electric fields on anisotropic antiferroelectrics. © 1980, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
R. Ghez, J.S. Lew
Journal of Crystal Growth
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics