Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
The Cl-Cu metal chemisorption is studied using molecular orbital theory. The surface is represented by a Cu cluster. The Cu atoms are described by a relativistic effective core potential having only one (4s1) valence electron. In particular, the Cl-Cu interlayer distance is calculated in order to complement the information obtained from recent LEED and SEXAFS studies and to calibrate the theoretical approach used. © 1984.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
T.N. Morgan
Semiconductor Science and Technology
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry