H.P. Lang, R. Berger, et al.
Applied Physics A: Materials Science and Processing
We demonstrate a new method for thermal analysis of nanogram quantities of material using a micromechanical thermogravimetric technique. The cantilever-type device uses an integrated piezoresistor to sense bending and simultaneously to ramp the temperature and control temperature cycles. It has a mass resolution in the picogram range. A quantitative analysis of the dehydration of copper-sulfate-pentahydrate (CuSO4·5H2O) is presented. The technique outperforms current thermogravimetric approaches by five orders of magnitude.
H.P. Lang, R. Berger, et al.
Applied Physics A: Materials Science and Processing
P. Mächtle, R. Berger, et al.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
R. Berger, E. Delamarche, et al.
Applied Physics A: Materials Science and Processing
H.P. Lang, M. Hegner, et al.
Nanotechnology