Performance measurement and data base design
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
Recent advances in the development of electrochemical metal-removal processes for microfabrication are reviewed in this paper. After a brief description of the process, several important parameters are identified that determine the material-removal rate, shape control, surface finishing, and uniformity. The influence of surface film properties, mass transport, and current distribution on microfabrication performance are discussed. Several examples of microelectronic component fabrication are presented. These examples demonstrate the challenges and opportunities offered by electrochemical metal removal in microfabrication.
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Nanda Kambhatla
ACL 2004