Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)

Abstract

We have obtained a low-loss image from a solid specimen in the high-field region of the condenser-objective lens in a high-resolution SEM. These experiments have demonstrated an edge sharpness of 15 Å and a point-to-point resolution of better than 50 Å between gold dots on a latex ball on a solid substrate. In theory, it should be possible to obtain micrographs from solid specimens with a resolution of 10 Å by this method. © 1973 American Institute of Physics.