Conference paper
Effects of BEOL stack on thermal mechanical stress of Cu lines
Seung-Hyun Rhee, Conal E. Murray, et al.
MRS Spring Meeting 2006
Review
Measurements of radioactive contaminants in semiconductor materials
Abstract
The emission of alpha particles from materials used to manufacture semiconductors can contribute substantially to the single-event upset rate. The alpha particles originate from contamination in the materials, or from radioactive isotopes, themselves. In this review paper, we discuss the sources of the radioactivity and the measurement methods to detect the emitted particles.