Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Paper
Matrices of polynomials, positivity, and finite equivalence of markov chains
Related
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Conference paper
Wavefront and caustic surfaces of refractive laser beam shaper
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Conference paper
Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009