K.N. Tu
Materials Science and Engineering: A
K.N. Tu
Materials Science and Engineering: A
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007