Michael G. Rosenfield, Douglas S. Goodman, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Michael G. Rosenfield, Douglas S. Goodman, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
F.H. Dill
ISSCC 1963
P.S. Hauge, F.H. Dill
Optics Communications
P.D. Robertson, F.W. Wise, et al.
Proceedings of SPIE 1989