F.H. Dill, Arnold S. Farber, et al.
IEEE JSSC
Paper
Machining Integrated Optical Structures in Photoresist
Abstract
No abstract available.
Related
K. Konnerth, F.H. Dill
Solid-State Electronics
Conference paper
Resist characterization: Procedures, parameters, and profiles
M. Exterkamp, W. Wong, et al.
Proceedings of SPIE 1989
Michael G. Rosenfield, Douglas S. Goodman, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena