PaperThe Phase-Shifting Mask II: Imaging Simulations and Submicrometer Resist ExposuresMarc D. Levenson, Scott Lindsey, et al.IEEE T-ED
PaperCalibration of a computer controlled robotic vision sensor with a zoom lensKonstantinos Tarabanis, Roger Y. Tsai, et al.Computer Vision and Image Understanding
PaperLine ratio and image formation in photolithographic projectorsJoseph E. Gortych, Douglas S. GoodmanApplied Optics
