Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The conventional result for the screening length in a semiconductor with a discrete impurity level vanishes at absolute zero. When level broadening is included in a self-consistent way, a finite value is obtained. Results for the screening length and the root-mean-square potential fluctuation at absolute zero are given as functions of the degree of compensation. © 1974 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Michiel Sprik
Journal of Physics Condensed Matter
R. Ghez, M.B. Small
JES