PublicationProceedings of SPIE 1989Conference paperLinewidth vernier (LWV)Proceedings of SPIE 1989View publicationAbstractNo abstract available.Home↳ PublicationsDate13 Sep 1982PublicationProceedings of SPIE 1989AuthorsB.J. LinIBM-affiliated at time of publicationTopicsMathematical SciencesPhysical SciencesComputer ScienceShare