Douglas S. Goodman
Applied Optics
The line ratio and the ratio of the subresolution line image irradiance extremum normalized to the aberration-free case is explored as a means of assessing aberration balance and as a line-imaging criterion for a photolithographic projection system. © 1994 Optical Society of America.
Douglas S. Goodman
Applied Optics
Douglas S. Goodman
Applied Optics
Douglas S. Goodman
Applied Optics
Douglas S. Goodman, Joseph E. Gortych
Applied Optics